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Trisilane

 

  • Product Number: 0017
  • CAS Number: 7783-26-8

  • Molecular Weight:  92.32
  • Molecular Formula:  Si3H8

Structure:

 

Properties

Boiling Point:  53 °C (lit.)                                           Purity by GC:  98.0% minimum
Melting Point:  -117 °C
Density:  0.743 g/mL at 25 °C
Appearance:  Colorless liquid
Vapor pressure:  95.5Torr @ 0°C

Applications:  Atomic layer deposition

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