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Tris(trichlorosilyl)silane

3TCSS 

  • Product Number: 0036
  • CAS Number: 62257-60-7

  • Molecular Weight:  432.43
  • Molecular Formula:  Cl9HSi4

Structure:

                        

Properties:

Appearance:                White solid or colorless liquid

Density:                       1.539 g/mL

Melting Point:             30 °C

Boiling Point:              60-62 °C at 0.2 torr

Vapor pressure:           1 torr @ 75 °C

Purity by GC:              99.0% minimum

Purity by ICP:             99.999% minimum

Applications: Si, SiO2, SiN deposition

 


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