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Tris(dimethylamino)silane, Electronic Grade

3DMAS (EG) 

  • Product Number: 0016
  • CAS Number: 15112-89-7

  • Molecular Weight:  161.32
  • Molecular Formula:  C6H19N3Si

Structure:

 

Properties

Boiling Point: 142 - 145 °C (lit.)                                 Purity by GC:  99.5 %, minimum
Melting Point:  -90 °C (lit.)                                         Purity by ICP:  99.999 %, minimum
Density:  0.850 g/mL at 20 °C (lit.)
Appearance:  Colorless liquid
Vapor pressure: 13 Torr @ 36 °C

Applications:  Silicon nitride deposition, hydrosilylation of olefins

 


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