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Tris(dimethylamino)chlorosilane, Electronic Grade

TDMACS (EG) 

  • Product Number: 0015
  • CAS Number: 13307-05-6

  • Molecular Weight:  195.77
  • Molecular Formula:  C6H18ClN3Si

Structure:

 

Properties

Boiling Point:  78 °C @ 14 Torr (lit.)                         Purity by GC:  99 %, minimum
Melting Point:  -90 °C (lit.)                                         Purity by ICP:  99.99 %, minimum
Density:  0.973 g/mL at 25 °C (lit.)
Appearance:  Colorless liquid

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