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Tetrakis(trichlorosilyl)silane

 

  • Product Number: 0014
  • CAS Number: 50350-62-4

  • Molecular Weight:  565.87
  • Molecular Formula:  Cl12Si5

Structure


Properties

Boiling Point:  190 °C at 15 Torr (sub.)
Melting Point:  55 °C 
Appearance:  White solid
Vapor pressure, 25°C:
0.1mm

Purity by GC:  98.0% minimum
Purity by %Cl:  98.0% minimum (optional)

Applications:  Silicon deposition

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