ISO 9001:2008 certified   For more information | Call (262) 293-0251

Tetrakis(ethylmethylamido)titanium

 

  • Product Number: 0028
  • CAS Number: 308103-54-0

  • Molecular Weight: 280.28
  • Molecular Formula: C12H32N4Ti

Structure:

Properties:


Appearance: Yellow-orange liquid

Density: 0.923 g/mL at 25 °C

Boiling point: 80°C at 0.1 torr

Purity by NMR: 98.0% minimum

Purity by ICP-OES: 99.999% minimum

Applications: Atomic Layer Deposition of Titanium containing films

Packaging:  Glass bottle, Stainless steel cylinder

download sds 

 


Go Back to Precursor Chemicals >>

Rapid Precursor Development™