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Tert-butylimido tris(ethylmethylamido) tantalum

 

  • Product Number: 0012
  • CAS Number: 511292-99-2

  • Molecular Weight:  426.39
  • Molecular Formula:  C1­3H334Ta

Structure:


Properties

Boiling Point:  98 °C @ 1.8 torr (lit.)                         Purity by NMR:  98.0% minimum
Density:  1.323 g/mL at 25 °C                                    Purity by ICP:  99.999% minimum
Appearance:  Pale yellow liquid

Applications: Atomic layer deposition

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