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Tert-butylimido tris(ethylmethylamido) niobium

 

  • Product Number: 0027
  • CAS Number: 864150-47-0

  • Molecular Weight: 338.34
  • Molecular Formula: C1333N4Nb

Structure:

Properties

Appearance: pale yellow liquid
Boiling Point: 86-87 °C @ 1.5 torr
Vapor pressure: 1 torr @ 78 °C


Purity by NMR: 98.0% minimum
Purity by ICP: 99.99% minimum

Applications: NbN, NbOx  layers deposition.

Packaging:  Glass bottle, Stainless steel cylinder


 


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