ISO 9001:2008 certified   For more information | Call (262) 293-0251

Tert-butylimido tris(diethylamido) tantalum

 

  • Product Number: 0011
  • CAS Number: 169896-41-7

  • Molecular Weight:  468.47
  • Molecular Formula:   C1639N4Ta

Structure:


Properties

Boiling Point:  95 °C @ 0.5 torr (lit.)                         Purity by NMR:  98.0% minimum
Density:  1.252 g/mL at 25 °C                                    Purity by ICP:  99.999% minimum
Appearance:  Pale yellow liquid

Applications:  Atomic layer deposition

download sds

 


Go Back to Precursor Chemicals >>

Rapid Precursor Development™