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Hexafluorodisilane

HFDS 

  • Product Number: 0007
  • CAS Number: 13830-68-7

  • Molecular Weight:  170.17
  • Molecular Formula:  F6Si2

Structure

 

Properties

Boiling Point:  -18.5 °C                                  Purity by GC:   95% minimum
Melting Point:  -18.7 °C
Density: 1.282 g/ml (liquid), 7.75 g/L (gas)

Appearance:  Colorless gas
Vapor pressure:  58.4 psi @ 26.6 °C

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