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Bis(ethylmethylamino)silane

BEMAS 

  • Product Number: 0019
  • CAS Number: 1011514-41-2

  • Molecular Weight: 146.31
  • Molecular Formula: C6H18N2Si
Structure:

Properties

Boiling Point: 134 °C (lit.)                              Purity by GC: 99.0% minimum  
Density: 0.8 g/mL at 25 °C Purity by ICP/MS: 99.999%
Appearance: colorless liquid                          
Applications: Atomic Layer Deposition.
 


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