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Bis(dimethylamino)dimethylsilane

 

  • Product Number: 0002
  • CAS Number: 3768-58-9

 

  • Molecular Formula:  C6H18N2Si
  • Molecular Weight:  146.31

Structure:

Properties

Boiling Point: 128-129 °C (lit.)                       Purity by GC:  99.0% minimum
Melting Point:  -98 °C                                    
Purity by ICP:  99.999%
Density:  0.809 g/mL at 25 °C                       
1H NMR:  Conforms to structure
Refractive index:  n20/D 1.417
Appearance:  Colorless liquid
Vapor pressure:  1mmHg @ 20ºC

Applications:  Atomic Layer Deposition

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