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Bis(diethylamino)silane, Electronic Grade

BDEAS (EG) 

  • Product Number: 0001-EG
  • CAS Number: 27804-64-4


  • Molecular Weight:  174.36
  • Molecular Formula:  C8H22N2Si

Structure:

Properties

Boiling Point:  70 °C @ 30 Torr (lit.)             Purity by GC:  99.5 %, minimum
Density:  0.804 g/mL (lit.)                              Purity by ICP:  99.999 %, minimum
Appearance:  Colorless liquid

Applications:  Precursor for hafnium-silicon oxides dielectric film deposition

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